FS1012-1020-NG

FS1012-1020-NG Features

FS1012-1020-NG Description

The FS1012 MEMS mass flow sensor module measures the flowrate using the thermo-transfer (calorimetric) principle. The FS1012is capable of measuring a gas or liquid medium.The FS1012 offers key advantages over resistor-based flowsolutions. The sensor utilizes thermopile sensing, which providesan excellent signal-to-noise ratio. The sensor comprises a “solid”thermal isolation technology and silicon-carbide coating to protectit from abrasive wear and provides robustness and long-termreliability. In comparison, other sensors typically contain a fragilemembrane above an etched cavity for the thermal isolation base.The FS1012 features the sensor fully assembled and wire-bondedout to a 6-pin header. Wetted materials consist of a glass fiberreinforced PA66 resin, epoxy, and silicon carbide.

FS1012-1020-NG Typical Applications

FS1012-1020-NG Pin Descriptions

Pin NumberPad NameTypeDescription123456TP1+TP1–HTR1HTR2TP2–TP2+OutputThermopile 1 (+)OutputThermopile 1 (–)InputInputOutputOutputHeaterHeaterThermopile 2 (–)Thermopile 2 (+)© 2018-2023 Renesas Electronics2March 10, 2023